Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies - Badih El-Kareh - Books - Springer-Verlag New York Inc. - 9780387367989 - January 12, 2009
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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies 2009 edition

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Compiled from industrial and academic lecture notes and reflecting years of experience in the development of silicon devices, this book covers both their theoretical and practical aspects, and how their electrical properties and processing conditions interact.


598 pages, 17 black & white tables, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 12, 2009
ISBN13 9780387367989
Publishers Springer-Verlag New York Inc.
Pages 598
Dimensions 155 × 235 × 33 mm   ·   1.04 kg
Language English  

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