Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope - Huiliang Cao - Books - Springer Verlag, Singapore - 9789811992469 - April 18, 2023
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Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope 2023 edition


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The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope.


224 pages, 137 Illustrations, color; 63 Illustrations, black and white; X, 224 p. 200 illus., 137 il

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 18, 2023
ISBN13 9789811992469
Publishers Springer Verlag, Singapore
Pages 224
Dimensions 150 × 220 × 20 mm   ·   524 g

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