Laser Heat-Mode Lithography: Principle and Methods - Springer Series in Materials Science - Jingsong Wei - Books - Springer Verlag, Singapore - 9789811509421 - November 29, 2019
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Jingsong Wei
Laser Heat-Mode Lithography: Principle and Methods - Springer Series in Materials Science 2019 edition

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This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.

208 pages, 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 29, 2019
ISBN13 9789811509421
Publishers Springer Verlag, Singapore
Pages 208
Dimensions 163 × 244 × 18 mm   ·   462 g

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