Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology - Seongbo Shim - Books - Springer International Publishing AG - 9783319762937 - April 3, 2018
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Seongbo Shim
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology 2018 edition

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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 3, 2018
ISBN13 9783319762937
Publishers Springer International Publishing AG
Pages 138
Dimensions 150 × 220 × 20 mm   ·   394 g
Language German  

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