Nanofabrication: Principles, Capabilities and Limits - Zheng Cui - Books - Springer International Publishing AG - 9783031625480 - July 16, 2025
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Zheng Cui
Nanofabrication: Principles, Capabilities and Limits Third Edition 2024 edition

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The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released July 16, 2025
ISBN13 9783031625480
Publishers Springer International Publishing AG
Pages 413
Dimensions 155 × 233 × 25 mm   ·   638 g
Language German  

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