Mems Mechanical Sensors - Steve P. Beeby - Books - Artech House Publishers - 9781580535366 - April 30, 2004
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Steve P. Beeby
Mems Mechanical Sensors

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The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

284 pages, 1, black & white illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 30, 2004
ISBN13 9781580535366
Publishers Artech House Publishers
Pages 284
Dimensions 184 × 256 × 23 mm   ·   644 g
Language English  

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