An Introduction to Surface-Micromachining - Robert W. Johnstone - Books - Springer-Verlag New York Inc. - 9781402080203 - June 3, 2004
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Robert W. Johnstone
An Introduction to Surface-Micromachining 2004 edition

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Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components.

189 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 3, 2004
ISBN13 9781402080203
Publishers Springer-Verlag New York Inc.
Pages 189
Dimensions 155 × 235 × 12 mm   ·   489 g

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