X-Ray Metrology in Semiconductor Manufacturing - Bowen, D. Keith (Bede Plc, Durham, UK) - Books - Taylor & Francis Inc - 9780849339288 - January 24, 2006
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Bowen, D. Keith (Bede Plc, Durham, UK)
X-Ray Metrology in Semiconductor Manufacturing 1st edition

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Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. It covers the essential metrological questions of precision and repeatability, absolute accuracy and spot size.

296 pages, 152 black & white illustrations, 14 black & white tables, 50 black & white halftones

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 24, 2006
ISBN13 9780849339288
Publishers Taylor & Francis Inc
Pages 296
Dimensions 162 × 245 × 21 mm   ·   586 g
Language English  

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