Semiconductor micromachining - Hans-joachim Lewerenz - Books - John Wiley And Sons Ltd - 9780471966821 - March 26, 1998
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Hans-joachim Lewerenz
Semiconductor micromachining Volume 2 edition

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A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.

406 pages, 141 illustrations, 34 graphs, 18 tables

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 26, 1998
ISBN13 9780471966821
Publishers John Wiley And Sons Ltd
Pages 406
Dimensions 156 × 237 × 29 mm   ·   742 g
Language English  
redaktor Lewerenz, H. J.

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