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EUV Lithography Vivek Bakshi
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EUV Lithography
Vivek Bakshi
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
700 pages, illustrations
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | January 16, 2009 |
| ISBN13 | 9780470471555 |
| Publishers | John Wiley & Sons Inc |
| Pages | 704 |
| Dimensions | 191 × 259 × 45 mm · 1.58 kg |
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