Atomic Layer Processing: Semiconductor Dry Etching Technology - Thorsten Lill - Books - Wiley-VCH Verlag GmbH - 9783527346684 - April 21, 2021
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Thorsten Lill
Atomic Layer Processing: Semiconductor Dry Etching Technology

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325 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released April 21, 2021
ISBN13 9783527346684
Publishers Wiley-VCH Verlag GmbH
Pages 304
Dimensions 245 × 171 × 18 mm   ·   584 g
Language English  

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